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难加工硬脆材料的纳米流体诱导摩擦化学机械抛光机理及工艺研究
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Leading Scientist : HSQ

Affiliation of Participant(s) : 301

Project Level : Provincial and ministerial-level

Type of Research Outcome : 基础研究

Sub-Class of Project : 省、市、自治区科技项目

Status : 进行

Supported by : Yanshan University

Type of Project : 基础研究

Nature of Project : 难加工硬脆材料的纳米流体诱导摩擦化学机械抛光机理及工艺研究

Project Number : E2022203123

Date of Project Approval : 2022-06-30

Expected Date of Project Completion : 2024-12-31

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Lecturer (University)

Alma Mater : 山东大学

Education Level : 博士研究生毕业

School/Department : 机械工程学院

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